@misc{indiciaee8a9223ba60d,
  title = {Process nano scale mechanical properties measurement of thin metal films using a novel paddle cantilever test structure},
  author = {Chi-Jia Tong and Ming-Tzer Lin},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0914},
  note = {Source identifier: 0805.0914}
}