@misc{indiciae89ec98f06056,
  title = {High Q-factor CMOS-MEMS inductor},
  author = {Ching-Liang Dai and Jin-Yu Hong and Mao-Chen Liu},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0915},
  note = {Source identifier: 0805.0915}
}