@misc{indiciae495333e2f663, title = {Through Silicon Vias as Enablers for 3D Systems}, author = {E. Jung and Andreas Ostmann and Peter Ramm and Jürgen Wolf and Michael Toepper and Maik Wiemer}, year = {2008}, url = {https://arxiv.org/abs/0805.0918}, note = {Source identifier: 0805.0918} }