@misc{indiciae6ffeacbb79db,
  title = {Fabrication of 3D Packaging TSV using DRIE},
  author = {M. Puech and Jean-Marc Thevenoud and J. M. Gruffat and N. Launay and N. Arnal and P. Godinat},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0919},
  note = {Source identifier: 0805.0919}
}