@misc{indiciaef1176401e0ce,
  title = {Next Generation of TCAD Environments for MEMS Design},
  author = {Udo Triltsch and Stephanus Büttgenbach},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0926},
  note = {Source identifier: 0805.0926}
}