@misc{indiciaedb8548b5a861,
  title = {Haptic sensing for MEMS with application for cantilever and Casimir effect},
  author = {M. Calis and Marc Desmulliez},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0929},
  note = {Source identifier: 0805.0929}
}