@misc{indiciae7fddb31532f7, title = {Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System}, author = {Salim Touati and Nicolas Lorphelin and Alexandre Kanciurzewski and Renaud Robin and A. -S. Rollier and Olivier Millet and Karim Segueni}, year = {2008}, url = {https://arxiv.org/abs/0805.0932}, note = {Source identifier: 0805.0932} }