@misc{indiciae21728fc60bd6,
  title = {High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection},
  author = {Jian Lu and T. Ikehara and Yi Zhang and Takashi Mihara and Toshihiro Itoh and Ryutaro Maeda},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0933},
  note = {Source identifier: 0805.0933}
}