TY  - RPRT
TI  - High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection
AU  - Jian Lu
AU  - T. Ikehara
AU  - Yi Zhang
AU  - Takashi Mihara
AU  - Toshihiro Itoh
AU  - Ryutaro Maeda
PY  - 2008
UR  - https://arxiv.org/abs/0805.0933
ID  - 0805.0933
ER  -