@misc{indiciae20b5e2e2160b,
  title = {A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications},
  author = {Renaud Robin and Salim Touati and Karim Segueni and Olivier Millet and Lionel Buchaillot},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0934},
  note = {Source identifier: 0805.0934}
}