@misc{indiciaeb336cb9a78a2,
  title = {Single-atom doping for quantum device development in diamond and silicon},
  author = {C. D. Weis and A. Schuh and A. Batra and A. Persaud and I. W. Rangelow and J. Bokor and C. C. Lo and S. Cabrini and E. Sideras-Haddad and G. D. Fuchs and R. Hanson and D. D. Awschalom and T. Schenkel},
  year = {2008},
  doi = {10.1116/1.2968614},
  url = {https://arxiv.org/abs/0806.2167},
  note = {Source identifier: 0806.2167}
}