@misc{indiciae3cac442ce8df,
  title = {Quantum Lithography Based on Multiple Light Exposures for Arbitrary Sub-Diffraction-Limit Pattern Generation},
  author = {Hee Su Park and Sun Kyung Lee},
  year = {2008},
  url = {https://arxiv.org/abs/0806.2175},
  note = {Source identifier: 0806.2175}
}