TY  - RPRT
TI  - Nano Imprint Lithography on Silica Sol-gels: a simple route to sequential patterning
AU  - Christophe Peroz
AU  - Vanessa Chauveau
AU  - Etienne Barthel
AU  - Elin Sondergard
PY  - 2008
UR  - https://arxiv.org/abs/0807.0378
ID  - 0807.0378
ER  -