@misc{indiciae2f09bd34047a,
  title = {Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si},
  author = {Teemu Hynninen and Adam S Foster and Miguel A Gosalvez and Kazuo Sato and Risto M Nieminen},
  year = {2008},
  doi = {10.1088/0953-8984/20/48/485005},
  url = {https://arxiv.org/abs/0807.1611},
  note = {Source identifier: 0807.1611}
}