TY  - RPRT
TI  - Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si
AU  - Teemu Hynninen
AU  - Adam S Foster
AU  - Miguel A Gosalvez
AU  - Kazuo Sato
AU  - Risto M Nieminen
PY  - 2008
DO  - 10.1088/0953-8984/20/48/485005
UR  - https://arxiv.org/abs/0807.1611
ID  - 0807.1611
ER  -