TY - RPRT TI - Development of a Classical Force Field for the Oxidised Si Surface: Application to Hydrophilic Wafer Bonding AU - Daniel J. Cole AU - Mike C. Payne AU - Gabor Csanyi AU - S. Mark Spearing AU - L. Colombi Ciacchi PY - 2008 DO - 10.1063/1.2799196 UR - https://arxiv.org/abs/0807.3215 ID - 0807.3215 ER -