@misc{indiciae03465b18ac7b,
  title = {Mapping of ion beam induced current changes in FinFETs},
  author = {C. D. Weis and A. Schuh and A. Batra and A. Persaud and I. W. Rangelow and J. Bokor and C. C. Lo and S. Cabrini and D. Olynick and S. Duhey and T. Schenkel},
  year = {2008},
  doi = {10.1016/j.nimb.2009.01.019},
  url = {https://arxiv.org/abs/0809.2113},
  note = {Source identifier: 0809.2113}
}