@misc{indiciae0b2c7ed258a3, title = {Charge state of the O\$\_\{2\}\$ molecule during silicon oxidation through hybrid functional calculations}, author = {Audrius Alkauskas and Peter Broqvist and Alfredo Pasquarello}, year = {2008}, doi = {10.1103/physrevb.78.161305}, url = {https://arxiv.org/abs/0809.4905}, note = {Source identifier: 0809.4905} }