TY  - RPRT
TI  - Charge state of the O$_{2}$ molecule during silicon oxidation through hybrid functional calculations
AU  - Audrius Alkauskas
AU  - Peter Broqvist
AU  - Alfredo Pasquarello
PY  - 2008
DO  - 10.1103/physrevb.78.161305
UR  - https://arxiv.org/abs/0809.4905
ID  - 0809.4905
ER  -