@misc{indiciaec0cab4a2851d,
  title = {Direct measurements of the energy flux due to chemical reactions at the surface of a silicon sample interacting with a SF6 plasma},
  author = {Remi Dussart and Anne-Lise Thomann and Laurianne E. Pichon and Larbi Bedra and Nadjib Semmar and Philippe Lefaucheux and Jacky Mathias and Yves Tessier},
  year = {2008},
  doi = {10.1063/1.2995988},
  url = {https://arxiv.org/abs/0811.0598},
  note = {Source identifier: 0811.0598}
}