TY  - RPRT
TI  - Direct measurements of the energy flux due to chemical reactions at the surface of a silicon sample interacting with a SF6 plasma
AU  - Remi Dussart
AU  - Anne-Lise Thomann
AU  - Laurianne E. Pichon
AU  - Larbi Bedra
AU  - Nadjib Semmar
AU  - Philippe Lefaucheux
AU  - Jacky Mathias
AU  - Yves Tessier
PY  - 2008
DO  - 10.1063/1.2995988
UR  - https://arxiv.org/abs/0811.0598
ID  - 0811.0598
ER  -