TY  - RPRT
TI  - Acetylene - Argon Plasmas Measured at a Biased Substrate Electrode for Diamond-Like Carbon Deposition. Part 2: Ion Energy Distributions
AU  - A. Baby
AU  - C. M. O. Mahony
AU  - P. Lemoine
AU  - P. D. Maguire
PY  - 2008
UR  - https://arxiv.org/abs/0811.4407
ID  - 0811.4407
ER  -