TY - RPRT TI - A picogram and nanometer scale photonic crystal opto-mechanical cavity AU - M. Eichenfield AU - R. Camacho AU - J. Chan AU - K. J. Vahala AU - O. Painter PY - 2008 DO - 10.1038/nature08061 UR - https://arxiv.org/abs/0812.2953 ID - 0812.2953 ER -