@misc{indiciae2c3cdeecd3ae, title = {Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing}, author = {Charles Santori and Paul E. Barclay and Kai-Mei C. Fu and Raymond G. Beausoleil}, year = {2009}, doi = {10.1103/physrevb.79.125313}, url = {https://arxiv.org/abs/0812.3905}, note = {Source identifier: 0812.3905} }