@misc{indiciae96c1201050b0,
  title = {Wafer-Scale, Sub-5 nm Junction Formation by Monolayer Doping and Conventional Spike Annealing},
  author = {Johnny C. Ho and Roie Yerushalmi and Gregory Smith and Prashant Majhi and Joseph Bennett and Jeffri Halim and Vladimir N. Faifer and Ali Javey},
  year = {2009},
  doi = {10.1021/nl8032526},
  url = {https://arxiv.org/abs/0901.1396},
  note = {Source identifier: 0901.1396}
}