@misc{indiciaef99e0cfda283,
  title = {Fabrication Technology of and Symmetry Breaking in Superconducting Quantum Circuits},
  author = {T. Niemczyk and F. Deppe and M. Mariantoni and E. P. Menzel and E. Hoffmann and G. Wild and L. Eggenstein and A. Marx and R. Gross},
  year = {2009},
  doi = {10.1088/0953-2048/22/3/034009},
  url = {https://arxiv.org/abs/0901.3652},
  note = {Source identifier: 0901.3652}
}