@misc{indiciaec96d5355e77d,
  title = {AFM and TEM study of hydrogenated sputtered Si/Ge multilayers},
  author = {C. Frigeri and L. Nasi and M. Serenyi and A. Csik and Z. Erdelyi and D. L. Beke},
  year = {2009},
  doi = {10.1016/j.spmi.2008.10.023},
  url = {https://arxiv.org/abs/0902.1679},
  note = {Source identifier: 0902.1679}
}