@misc{indiciaec0dcd664de78,
  title = {Investigation of Sb diffusion in amorphous silicon},
  author = {A. Csik and G. A. Langer and G. Erdelyi and D. L. Beke and Z. Erdelyi and K. Vad},
  year = {2009},
  url = {https://arxiv.org/abs/0902.2042},
  note = {Source identifier: 0902.2042}
}