@misc{indiciae2136ef873390,
  title = {Depth-Resolved Subsurface Defects in Chemically Etched SrTiO3},
  author = {Jun Zhang and D. Doutt and T. Merz and J. Chakhalian and M. Kareev and J. Liu and L. J. Brillson},
  year = {2009},
  doi = {10.1063/1.3093671},
  url = {https://arxiv.org/abs/0903.1853},
  note = {Source identifier: 0903.1853}
}