@misc{indiciaecdf30bf92fc5,
  title = {Electrostatically actuated silicon-based nanomechanical switch at room temperature},
  author = {Diego N. Guerra and Matthias Imboden and Pritiraj Mohanty},
  year = {2009},
  doi = {10.1063/1.2964196},
  url = {https://arxiv.org/abs/0903.2491},
  note = {Source identifier: 0903.2491}
}