TY  - RPRT
TI  - Electrostatically actuated silicon-based nanomechanical switch at room temperature
AU  - Diego N. Guerra
AU  - Matthias Imboden
AU  - Pritiraj Mohanty
PY  - 2009
DO  - 10.1063/1.2964196
UR  - https://arxiv.org/abs/0903.2491
ID  - 0903.2491
ER  -