@misc{indiciae67db31c833dc,
  title = {Critical issues in the formation of quantum computer test structures by ion implantation},
  author = {T. Schenkel and C. C. Lo and C. D. Weis and A. Schuh and A. Persaud and J. Bokor},
  year = {2009},
  doi = {10.1016/j.nimb.2009.05.061},
  url = {https://arxiv.org/abs/0904.4688},
  note = {Source identifier: 0904.4688}
}