TY  - RPRT
TI  - Critical issues in the formation of quantum computer test structures by ion implantation
AU  - T. Schenkel
AU  - C. C. Lo
AU  - C. D. Weis
AU  - A. Schuh
AU  - A. Persaud
AU  - J. Bokor
PY  - 2009
DO  - 10.1016/j.nimb.2009.05.061
UR  - https://arxiv.org/abs/0904.4688
ID  - 0904.4688
ER  -