@misc{indiciae5e7d398f60b7, title = {Etching of Graphene Devices with a Helium Ion Beam}, author = {M. C. Lemme and D. C. Bell and J. R. Williams and L. A. Stern and B. W. H. Baugher and P. Jarillo-Herrero and C. M. Marcus}, year = {2009}, doi = {10.1021/nn900744z}, url = {https://arxiv.org/abs/0905.4409}, note = {Source identifier: 0905.4409} }