@misc{indiciaebe53380f293c,
  title = {Device fabrication and transport measurements of FinFETs built with \$\textasciicircum{}\{28\}\$Si SOI wafers towards donor qubits in silicon},
  author = {CC Lo and A Persaud and S Dhuey and D Olynick and F Borondics and MC Martin and HA Bechtel and J Bokor and T Schenkel},
  year = {2009},
  doi = {10.1088/0268-1242/24/10/105022},
  url = {https://arxiv.org/abs/0906.1995},
  note = {Source identifier: 0906.1995}
}