TY - RPRT TI - Micromachined piezoelectric membranes with high nominal quality factors in newtonian liquid media: A Lamb's model validation at the microscale AU - Cédric Ayela AU - Liviu Nicu PY - 2009 DO - 10.1016/j.snb.2006.10.048 UR - https://arxiv.org/abs/0906.3616 ID - 0906.3616 ER -