@misc{indiciae99f176f8b1dd,
  title = {Dose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2},
  author = {Vinzenz Friedli and Ivo Utke and Kristian Molhave and Johann Michler},
  year = {2009},
  doi = {10.1088/0957-4484/20/38/385304},
  url = {https://arxiv.org/abs/0906.3650},
  note = {Source identifier: 0906.3650}
}