TY  - RPRT
TI  - Dose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2
AU  - Vinzenz Friedli
AU  - Ivo Utke
AU  - Kristian Molhave
AU  - Johann Michler
PY  - 2009
DO  - 10.1088/0957-4484/20/38/385304
UR  - https://arxiv.org/abs/0906.3650
ID  - 0906.3650
ER  -