@misc{indiciae6b379a5e8829,
  title = {Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits},
  author = {Hanhee Paik and Kevin D. Osborn},
  year = {2010},
  doi = {10.1063/1.3309703},
  url = {https://arxiv.org/abs/0908.2948},
  note = {Source identifier: 0908.2948}
}