TY  - RPRT
TI  - Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits
AU  - Hanhee Paik
AU  - Kevin D. Osborn
PY  - 2010
DO  - 10.1063/1.3309703
UR  - https://arxiv.org/abs/0908.2948
ID  - 0908.2948
ER  -