@misc{indiciae7d7c2892dc31,
  title = {Cavity optomechanics with stoichiometric SiN films},
  author = {D. J. Wilson and C. A. Regal and S. B. Papp and H. J. Kimble},
  year = {2009},
  doi = {10.1103/physrevlett.103.207204},
  url = {https://arxiv.org/abs/0909.0970},
  note = {Source identifier: 0909.0970}
}