@misc{indiciae7dc4bc71dce1, title = {Fabrication process-induced variations of Nb/Al/AlOx/Nb Josephson junctions in superconductor integrated circuits}, author = {Sergey K. Tolpygo and Denis Amparo}, year = {2009}, doi = {10.1088/0953-2048/23/3/034024}, url = {https://arxiv.org/abs/0909.3076}, note = {Source identifier: 0909.3076} }