TY  - RPRT
TI  - Fabrication process-induced variations of Nb/Al/AlOx/Nb Josephson junctions in superconductor integrated circuits
AU  - Sergey K. Tolpygo
AU  - Denis Amparo
PY  - 2009
DO  - 10.1088/0953-2048/23/3/034024
UR  - https://arxiv.org/abs/0909.3076
ID  - 0909.3076
ER  -