@misc{indiciaed1c95ce8ad39,
  title = {Single ion implantation for single donor devices using Geiger mode detectors},
  author = {E. Bielejec and J. A. Seamons and M. S. Carroll},
  year = {2009},
  doi = {10.1088/0957-4484/21/8/085201},
  url = {https://arxiv.org/abs/0909.5189},
  note = {Source identifier: 0909.5189}
}