TY  - RPRT
TI  - Single ion implantation for single donor devices using Geiger mode detectors
AU  - E. Bielejec
AU  - J. A. Seamons
AU  - M. S. Carroll
PY  - 2009
DO  - 10.1088/0957-4484/21/8/085201
UR  - https://arxiv.org/abs/0909.5189
ID  - 0909.5189
ER  -