@misc{indiciaeb2dc95ba08e9, title = {Development of Thick-foil and Fine-pitch GEMs with a Laser Etching Technique}, author = {T. Tamagawa and A. Hayato and F. Asami and K. Abe and S. Iwamoto and S. Nakamura and T. Iwahashi and S. Konami and H. Hamagaki and Y. L. Yamaguchi and H. Tawara and K. Makishima}, year = {2009}, doi = {10.1016/j.nima.2009.07.014}, url = {https://arxiv.org/abs/0910.0406}, note = {Source identifier: 0910.0406} }