@misc{indiciaee2d6a79b92c8, title = {Generic nano-imprint process for fabrication of nanowire arrays}, author = {Aurelie Pierret and Moira Hocevar and Silke L. Diedenhofen and Rienk E. Algra and E. Vlieg and Eugene C. Timmering and Marc A. Verschuuren and George W. G. Immink and Marcel A. Verheijen and Erik P. A. M. Bakkers}, year = {2009}, doi = {10.1088/0957-4484/21/6/065305}, url = {https://arxiv.org/abs/0911.2235}, note = {Source identifier: 0911.2235} }