@misc{indiciae9a38b81d7842,
  title = {Ultra-dense phosphorus in germanium delta-doped layers},
  author = {G. Scappucci and G. Capellini and W. C. T. Lee and M. Y. Simmons},
  year = {2009},
  doi = {10.1063/1.3123391},
  url = {https://arxiv.org/abs/0912.0751},
  note = {Source identifier: 0912.0751}
}