TY  - RPRT
TI  - Ultra-dense phosphorus in germanium delta-doped layers
AU  - G. Scappucci
AU  - G. Capellini
AU  - W. C. T. Lee
AU  - M. Y. Simmons
PY  - 2009
DO  - 10.1063/1.3123391
UR  - https://arxiv.org/abs/0912.0751
ID  - 0912.0751
ER  -