@misc{indiciae2944433de3a5,
  title = {Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma},
  author = {Hongyu Wang and Wei Jiang and Zhenhua Bi and Younian Wang},
  year = {2009},
  url = {https://arxiv.org/abs/0912.5129},
  note = {Source identifier: 0912.5129}
}